New Horizons of Microelectromechanical Systems in the Automotive Industry
Abstract
Microelectromechanical Systems (MEMS) are the integration of mechanical components, sensors, actuators, and electronic devices on a silicon substrate using microchip fabrication technology to realize System on Chip (SoC). With technological advancements, there is a growing need for more precise measurement tools to improve the quantity and quality of devices like automobiles. This demand has driven advancements in microchip manufacturing technology and led to the emergence of MEMS technology with higher precision, smaller sizes, and lower costs. The application of these devices in practical fields such as accelerometers, manifold pressure sensors, gyroscopes, micro-optic sensors, automotive airbags, inertial navigation, guidance and control systems, and motion control systems has resulted in enhanced reliability and safety. MEMS enable the creation of small, efficient, and multifunctional devices for simultaneous monitoring of parameters such as temperature and pressure. In the context of smart, autonomous, and Electric Vehicles (EV), the focus is on pressure sensors, accelerometers, and gyroscopes. This article examines the capability of MEMS accelerometers to measure the parameters of vibration in various vehicle locations, considering the dynamic functions of cars. It also reviews the Tire Pressure Monitoring System (TPMS) and Motor Air Pressure (MAP) sensors.
Keywords:
Microelectromechanical inertial sensors, Micro accelerometer, Microelectromechanical systems, Pressure sensor, Acceleration sensorReferences
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